Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Characteristics of large-diameter plasma using a radial ... Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ... Computational modeling study of the radial line slot ...
A Design of Compact Radial Line Slot Array (RLSA) Antennas for Wi-Fi Market Needs Teddy Purnamirza1, *, Donny Kristanto 1,andImranM.BinIbrahim2 Abstract—This paper proposes a compact Radial Line Slot Array (RLSA) antenna for 5.8GHz Wi-Fi devices, which meets market needs. Various small RLSA antenna models with radius of 140mm, were
To reduce the radar cross section of a waveguide slot antenna, a three-layer metamaterial is presented based on orthogonal double split-ring resonators. US7164387B2 - Compact tunable antenna - Google Patents The present disclosure relates to a method and an antenna for transmitting/receiving a RF signal at a plurality of different frequencies. Transmitting/receiving a RF signal at a plurality of different frequencies is achieved by providing a … US3668459A - Coupled cavity slow wave circuit and tube using… Each axially aligned array of coupling slots includes means for interrupting the flow of electrons through the slots such as a blocking member or the slots are staggered or offset in radial or angular position such as to block off a line-of … US5370765A - Electron cyclotron resonance plasma source and… A method and apparatus are disclosed employing electron cyclotron resonant (ECR) heating to produce plasma for applications including but not limited to chemical vapor deposition and etching.
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Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna.
Simulation of microwave pulsing in a radial line slot ...
The radial line slot antenna plasma source is a high-density microwave plasma source comprising a high electron temperature source region within the plasma skin depth from a coupling window and low electron temperature diffusion region far from the window. RADIAL LINE SLOT ANTENNAS FED BY A RECTANGULAR WAVEGUIDE ... RADIAL LINE SLOT ANTENNAS FED BY A RECTANGULAR WAVEGUIDE THROUGH A CROSSED SLOT Kaoru SUDO∗, Takuichi HIRANO, Jiro HIROKAWA, and Makoto ANDO Department of Electrical and Electronic Engineering, Tokyo Institute of Technology 2-12-1, O-okayama, Meguro-ku, Tokyo, 152-8552, Japan E-mail: ksudo@antenna.ee.titech.ac.jp 1 Introduction
A tunable microwave slot antenna based on graphene - osti.gov
The Japan Society of Applied Physics (JSAP) serves as an academic interface between science and engineering and an interactive platform for academia and the industry. JSAP is a "conduit" for the transfer of fundamental concepts to the industry for development and technological applications. JSAP was ... Characteristics of large-diameter plasma using a radial ... Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ... Near field distributions in radial line slot antennas for ... Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Simulation of microwave pulsing in a radial line slot ... Simulation of microwave pulsing in a radial line slot antenna etch process reactor ROCHAN UPADHYAY, Esgee Technologies Inc., KIYOTAKA ISHIBASHI, Tokyo Electron Limited, LAXMINARAYAN RAJA, The University of Texas at Austin — The radial line slot antenna reactor couples the microwave power to a process plasma through a slot antenna.
Characteristics of large-diameter plasma using a radial ... Characteristics of the surface-wave plasma generated by a radial-line slot antenna (RLSA) have been studied by both direct plasma probe measurements and numerical simulations. Some unique characteristics have been found, including excellent critical radial plasma uniformity, low electron temperature under various pressure conditions, the main plasma generation area of RLSA being limited in the ... Near field distributions in radial line slot antennas for ... Abstract: The near field distributions in radial line slot antennas (RLSA) for surface wave coupled plasma (SWP) are examined. The RLSA are suitable for uniform, high density and large-area plasma generation. In order to realize higher productivity, quick evacuation of reaction gas a narrow gap process space is highly required. Simulation of microwave pulsing in a radial line slot ...